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transport system controller architecture
本スタンダードでは，半導体製造装置においてSEMIが指定するデバイスモデル（共通およびデバイス固有）に従って動作するセンサ／アクチュエータネットワーク（SAN）上のインテリジェントなデバイス間の通信を可能にするためのEtherNet/IP （Ethernet/Industrial Protocol）ネットワークに基づいた通信仕様を定義する。
if necessary
- Performance criteria of cells/modules packaging previously not defined in the PV industry
P00200 - SEMI P2 - Specification for Chrome Thin Films for Hard Surface Photomasks StdVol-HB-LED transport system controller architectureNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. NOTICE: This Document was completely rewritten in 2008. This Specification covers the general requirements of the chrome thin film for hard surface photomasks. Referenced SEMI Standards SEMI P1 Specification for Hard