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低レベルのデバイスのネットワーク化の解決法
and delivery conditions should be taken into account when planning the testing
The recovery of these elements from the silicon bulk is measured between 75% to 125%
SEMI P45-0421 (technical revision)
MF139100 - SEMI MF1391 - Test Method for Substitutional Atomic Carbon Content of Silicon by Infrared Absorption Revision:SEMI MF1391-0704 - Superseded 低レベルのデバイスのネットワーク化の解決法This reference Test Method covers the determination of substitutional carbon concentration in single crystal silicon. Because carbon may also reside in interstitial lattice positions when in concentrations near the solid solubility limit, the results of this Test Method may not be a measure of the total carbon concentration at such concentrations. The useful range of carbon concentration measurable by this Test Method is from the maximum amount of
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