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M04000 - SEMI M40 - シリコンウェーハ表面のラフネス測定のガイド Revision:SEMI M40-1109 - Superseded This Specification defines the reading

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Description

This Specification defines the reading window to increase the success probability of reading

本スタンダードは,global Silicon Wafer Committeeで技術的に承認されている。現版は2010年12月21日,global Audits and Reviews Subcommitteeにて発行が承認された。2011年2月にwww

SEMI E40-0309 (technical revision)

SEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers

M04000 - SEMI M40 - シリコンウェーハ表面のラフネス測定のガイド Revision:SEMI M40-1109 - Superseded This Specification defines the readingglobal Silicon Wafer Committee200994global Audits and Reviews Subcommittee200910www. semi. org200911CD ROM20002 SEMI M1 3 Referenced SEMI Standards SEMI E89 Guide for Measurement System Analysis (MSA) SEMI M1 Specifications for Polished Single Crystal Silicon Wafers SEMI M20 Practice for Establishing a Wafer Coordinate System SEMI M50 Test Method for Determining Capture Rate and False Count Rate

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