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1 — Specification for Cluster Tool Module Interface: Mechanical Interface and Wafer Transport
commonly called metric
SEMI MF1529-0923 (technical revision)
Options defined are as follows:
D08600 - SEMI D86 - Test Method of Flicker Nuisance for Wide-Visual-Field Displays ElnTpc-Safety - Human 1 — Specification for ClusterThis Test Method aims to elucidate the measures of flicker nuisance from playing motion pictures on wide visual field displays, such as large size curved displays, near eye displays or flexible displays etc. The Test Method proposes an objective detection algorithm and presents resultant examples on assessing flickering light from display applications. Finally, the Test Method reveals that the 90th percentile of magnitude spectrum is a proper measure
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