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SEMI’s Data Path Task Force formed a working group to define a successor to the venerable GDSII Stream format
The adoption of the standards described will greatly reduce the effort required to integrate compliant equipment components
as appropriate
本スタンダードは，global Compound Semiconductor Committeeで技術的に承認されている。現版は2011年5月13日，global Audits and Reviews Subcommitteeにて発行が承認された。2011年6月にwww
T01000 - SEMI T10 - Test Method for the Assessment of 2D Data Matrix Direct Mark Quality Revision:SEMI T10-0701 (Reapproved 0923) - Current SEMI’s Data Path Task ForceThis Standard is intended to define the methodology for the assessment of 2D Data Matrix direct mark quality. This Standard defines assessment criteria, metrology methods, and assessment reporting procedures as applied to 2D Data Matrix code direct marks on semiconductor related materials. Application specifications, which refer to this Standard, may further limit its scope to more specific requirements of a particular application. Referenced SEMI