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SEMI E5 ¾ SEMI Equipment Communications Standard 2 Message Content (SECS-II)
This Document covers requirements for hydrogen chloride used in the semiconductor industry
This Specification does not apply when inserting open cassettes into load-lock chambers directly
and General and specific recommendations of XML style and usage
F07700 - SEMI F77 - Test Method for Electrochemical Critical Pitting Temperature Testing of Stainless Steel Surfaces Used in Corrosive Gas Systems StdPbc-0116 SEMI E5 ¾ SEMI EquipmentThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19, 2015. Available at www. semiviews. org and www. semi. org in September 2015; originally published July 2003; previously published March 2010. NOTICE: This Document was completely rewritten in 2015. The purpose of this Test Method is to determine the relative resistance to